A MEMS-based piezoelectric power generator array for vibration energy harvesting

Piezoelectric power generator made by microelectromechanical system (MEMS) technology can scavenge power from low-level ambient vibration sources. The developed MEMS power generators are featured with fixed/narrow operation frequency and power output in microwatt level, whereas, the frequency of ambient vibration is floating in some range, and power output is insufficient. In this paper, a power generator array based on thick-film piezoelectric cantilevers is investigated to improve frequency flexibility and power output. Piezoelectric cantilevers array has been designed and fabricated. The cantilevers array can be tuned to the frequency and expanded the excited frequency bandwidth in ambient low frequency vibration. Serial connection among cantilevers of the array is investigated. The prototype generator has a measured performance of 3.98 μW effective electrical power and 3.93 DC output voltage to resistance load. This device is promising to support networks of ultra-low-power, peer-to-peer, wireless nodes.