کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
542723 871569 2006 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Fabrication of 3D MEMS toroidal microinductor for high temperature application
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
Fabrication of 3D MEMS toroidal microinductor for high temperature application
چکیده انگلیسی

Based on Microelectromechanical systems (MEMS) technique and thick photoresist lithography technology, a new toroidal-type inductor for high temperature application has been successfully developed. In the fabrication process, heat-resistant materials are used, alumina as insulator and supporting materials instead of polyimide, heat resistant glass for underlay instead of normal glass, and copper for coil. The maximum inductance is 87 nH at 0.826 GHz and maximum of quality factor (Q-factor) is 4.63 at 0.786 GHz, at room temperature. With simulation of thermal deformation, it shows that the developed toroidal inductor can be suitable for high temperature application, from 300 to 700 °C.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronics Journal - Volume 37, Issue 11, November 2006, Pages 1347–1351
نویسندگان
, , , , , , ,