Improvement of the MEMS bionic vector hydrophone

A kind of MEMS vector hydrophone with bionics structure was introduced in 2007. As the acoustic–electric transducer structure and the acoustic package of hydrophone have been optimized, the performance of the hydrophone has been greatly improved compared with the previous. This hydrophone calibration was completed in the National Defense Underwater Acoustics Calibration Laboratory of China. According to the test results, the sensitivity of the hydrophone is −165 dB (including pre-amplification 20 dB), the frequency response ranges from 20 Hz to 2 kHz (±5 dB), and this hydrophone has a good directional pattern in the form of “8”-shape.