کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5438148 1398181 2017 8 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Tailoring transparence in MoOx/Ag/MoOx electrode through Ag by O2/Ar plasma exposure
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سرامیک و کامپوزیت
پیش نمایش صفحه اول مقاله
Tailoring transparence in MoOx/Ag/MoOx electrode through Ag by O2/Ar plasma exposure
چکیده انگلیسی
In this study, amorphous MoOx films and Ag metal films were deposited on soda-lime glass via a sputtering system at room temperature. The experimental results indicate that MoOx films prepared with a 6% O2/Ar flow rate exhibit an amorphous phase with high transparency and an optical band gap of 2.7 eV. In-situ O2/Ar plasma was adopted to further modify the surface of the Ag mid-layer after deposition. This approach can enhance the visible transmittance of MoOx and Ag-based multilayers with the same sheet resistance. The polygrains oriented along the (111) and (200) directions in the inserted Ag thin films were adopted to supply carriers into the MoOx film and decrease the sheet resistance of the MoOx and Ag-based multilayer. The multilayer structure exhibited a sufficiently large Ag thickness (>10 nm), low resistance, and visible transmittance to serve as a transparent conductive electrode. The dependence of the Ag thickness, MoOx thickness, and plasma treatment time on the optical and electrical properties of Ag/MoOx and symmetric MoOx/Ag/MoOx were also explored. A figure of merit (FOM) of 5.3×10−2 (Ω−1) was achieved at the visible wavelength of 550 nm for a MoOx/Ag/MoOx stacked layer with a 10-nm-thick Ag layer and a 30-nm-thick MoO3 layer. Such a MoOx/Ag/MoOx stacked structure might be a promising electrode in potential applications of transparent conductive oxides.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Ceramics International - Volume 43, Issue 1, Part A, January 2017, Pages 308-315
نویسندگان
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