کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5438655 | 1398186 | 2017 | 9 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Nanopore diameter-dependent properties of thin three-dimensional ZnO layers deposited onto nanoporous silicon substrates
دانلود مقاله + سفارش ترجمه
دانلود مقاله ISI انگلیسی
رایگان برای ایرانیان
کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سرامیک و کامپوزیت
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Nanopore diameter-dependent properties of thin three-dimensional ZnO layers deposited onto nanoporous silicon substrates Nanopore diameter-dependent properties of thin three-dimensional ZnO layers deposited onto nanoporous silicon substrates](/preview/png/5438655.png)
چکیده انگلیسی
In this paper, nanoporous silicon (NPSi) substrates with various pore diameters-ranging from 50Â nm to 100Â nm-were prepared by inductively coupled plasma (ICP) etching using anodic aluminum oxide (AAO) masks. Thin three-dimensional (3D) ZnO layers were deposited onto as-obtained NPSi substrates using atomic layer deposition (ALD). The results show that the silicon nanopore diameter has a large influence on the morphology, structure, and optical properties of thin 3D ZnO layers deposited onto NPSi substrate. A thin ZnO layer with optimal 3D morphology, crystallinity and luminescence performance is obtained when the silicon nanopore diameter is 90Â nm. The results also reveal that a silicon nanopore diameter increase greatly benefits thin 3D ZnO layer growth given that the NPSi substrate morphology is not destroyed. These investigations bring important guiding role for attaining AAO-assisted 3D semiconductor materials with nanoscale structure and high luminescence performance.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Ceramics International - Volume 43, Issue 6, 15 April 2017, Pages 5173-5181
Journal: Ceramics International - Volume 43, Issue 6, 15 April 2017, Pages 5173-5181
نویسندگان
Ji-Li Tian, Gui-Gen Wang, Hua-Yu Zhang, Jie-Cai Han,