Electrical and optical properties of hydrogen plasma treated molybdenum-doped indium oxide films synthesized by polymer-assisted deposition method

In this paper, the effects of hydrogen (H2) plasma treatment on the molybdenum (Mo)-doped indium oxide (InO) thin film that was formed on glass using the polymer-assisted deposition (PAD) process were investigated. The sheet resistance for the sample treated at the ICP power of 15 W was quenched to 167 Ω/sq. from the 680 Ω/sq. for the as-deposited sample. Compared with the as-deposited sample, both the mobility and the concentration of the sample treated at the 15 W ICP power were also increased simultaneously, resulting in an increased conductivity. From these results, it was concluded that the H2 plasma treatment is an efficient method for the enhancement of the electrical property, as well as to remove nano-sized cracks on the surface of the PAD-Mo-doped InO without a deterioration the optical transmittance.