کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
544166 871716 2006 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Modeling and gradient pattern analysis of irregular SFM structures of porous silicon
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
Modeling and gradient pattern analysis of irregular SFM structures of porous silicon
چکیده انگلیسی

Technological applications in opto-electronic devices have increased the interest in characterizing porous silicon structure patterns. Due to its physical properties, solutions from KPZ 2D are adopted to simulate the structure of porous material interface whose spatial characteristics are equivalent to those found in porous silicon samples. The analysis of the simulated and real Scanning Force Microscopy (SFM) surfaces was done using the Gradient Pattern Analysis (GPA). We found that the KPZ 2D model presented asymmetry levels compatible with the irregular surfaces observed by means of SFM images of π-Si.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronics Journal - Volume 37, Issue 4, April 2006, Pages 290–294
نویسندگان
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