کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5448403 | 1511779 | 2016 | 8 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Deposition characteristics of titanium coating deposited on SiC fiber by cold-wall chemical vapor deposition
ترجمه فارسی عنوان
خصوصیات رسوب شدن پوشش تیتانیوم روی فیبر سیم سیلیکون توسط رسوب بخار شیمیایی با دیواره سرد
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
مواد الکترونیکی، نوری و مغناطیسی
چکیده انگلیسی
The deposition characteristics of titanium coating on SiC fiber using TiCl4-H2-Ar gas mixture in a cold-wall chemical vapor deposition were studied by the combination of thermodynamic analysis and experimental studies. The thermodynamic analysis of the reactions in the TiCl4-H2-Ar system indicates that TiCl4 transforms to titanium as the following paths: TiCl4 â TiCl3 â Ti, or TiCl4 â TiCl3 â TiCl2 â Ti. The experimental results show that typical deposited coating contains two distinct layers: a TiC reaction layer close to SiC fiber and titanium coating which has an atomic percentage of titanium more than 70% and that of carbon lower than 30%. The results illustrate that a carbon diffusion barrier coating needs to be deposited if pure titanium is to be prepared. The deposition rate increases with the increase of temperature, but higher temperature has a negative effect on the surface uniformity of titanium coating. In addition, appropriate argon gas flow rate has a positive effect on smoothing the surface morphology of the coating.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Materials Chemistry and Physics - Volume 184, 1 December 2016, Pages 189-196
Journal: Materials Chemistry and Physics - Volume 184, 1 December 2016, Pages 189-196
نویسندگان
Xian Luo, Shuai Wu, Yan-qing Yang, Na Jin, Shuai Liu, Bin Huang,