کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5462864 1517183 2017 11 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Epitaxial growth of α-Ga2O3 thin films on a-, m-, and r-plane sapphire substrates by mist chemical vapor deposition using α-Fe2O3 buffer layers
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Epitaxial growth of α-Ga2O3 thin films on a-, m-, and r-plane sapphire substrates by mist chemical vapor deposition using α-Fe2O3 buffer layers
چکیده انگلیسی
Epitaxial a-, m-, and r-plane α-Ga2O3 thin films were successfully grown on a-, m-, and r-plane sapphire substrates through the insertion of α-Fe2O3 buffer layers using mist chemical vapor deposition. The α-Fe2O3 buffer layers improved the crystal growth of the α-Ga2O3 thin films. We reveal that the out-of-plane and in-plane orientations of each plane α-Ga2O3 thin film corresponded to that of each plane sapphire substrate. The direct bandgap of the α-Ga2O3 thin films from the optical transmittance and reflectance results of a-, m-, and r-planes was estimated to be 5.15-5.2 eV. The epitaxial α-Ga2O3 thin films on the various sapphire substrates are promising materials for power devices and deep ultraviolet region optoelectronic devices.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Materials Letters - Volume 205, 15 October 2017, Pages 28-31
نویسندگان
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