Characteristics of IGZO/Ni/IGZO tri-layer films deposited by DC and RF magnetron sputtering

Although the observed XRD pattern indicates that the IGZO films are amorphous structures, the surface roughness and electrical conductivity increased as the thickness of the Ni interlayer increased. In addition, the rough surface and enhanced carrier density of the films due to the Ni interlayer results in the decreased visible transmittance and low emissivity of the films.