کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5464612 | 1398856 | 2017 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Effect of bias voltage on the properties of CeO2âx coatings prepared by magnetron sputtering
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Effect of bias voltage on the properties of CeO2âx coatings prepared by magnetron sputtering Effect of bias voltage on the properties of CeO2âx coatings prepared by magnetron sputtering](/preview/png/5464612.png)
چکیده انگلیسی
In this study, cerium oxide (CeO2âx) coatings were deposited onto silicon substrates by reactive unbalanced magnetron sputtering in an Ar-O2 gas mixture. The effect of substrate negative bias voltage on the surface morphology, wetting behavior, microstructure, mechanical and tribological properties of CeO2âx coatings were systematically investigated. It was found that the surface morphology and the root mean square (RMS) roughness of the coatings exhibited a non-linear evolution. The smoothest surface with a RMS roughness of about 3.3 nm was obtained at a bias voltage of â 60 V. All deposited coatings exhibited a hydrophobic feature with the water contact angle around 100°, which was close to the value obtained from Teflon surface. X-ray diffraction (XRD) analyses revealed the best crystallinity of CeO2âx coatings in cubic CeO2 phase at a critical value of â 80 V bias. Cross-sectional scanning electron microscope (SEM) images displayed typical columnar-type structures with a relatively large column grain for the coating deposited at â 20 V and a dense, fine-grained microstructure obtained at â 80 V. The microstructure improvement at the optimized bias (â 80 V) contributed further to the enhancement in the hardness, reaching a maximum value of ~ 18.0 GPa. The average friction coefficients of as-deposited coatings prepared between â 40 and â 120 V were measured to be around ~ 0.40, whereas the coating prepared at â 80 V showed the best anti-wear performance. The wear volumes were two orders of magnitude lower than that of 316 stainless steel (SS) and three orders of magnitude lower than that of Teflon.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface and Coatings Technology - Volume 326, Part B, 15 October 2017, Pages 411-416
Journal: Surface and Coatings Technology - Volume 326, Part B, 15 October 2017, Pages 411-416
نویسندگان
Zhen Shi, Powan Shum, Zhifeng Zhou, Lawrence Kwok-Yan Li,