کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5464884 1517574 2016 7 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Microstructure evolution and protective properties of TaN multilayer coatings
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Microstructure evolution and protective properties of TaN multilayer coatings
چکیده انگلیسی
The protective Tantalum nitride (TaN) multilayer coatings staked by the TaN layers with alternatively structures at various deposition input powers were proposed in this study. The TaN multilayer coatings were sequentially deposited with layers at 75 and 150 W by magnetron sputtering. The effects of microstructure and layer thickness for multilayer were investigated. The 20-layer TaN multilayer coating with layer thickness of 50 nm exhibited stratified structure with an amorphous/crystalline altering feature, while the 50-layer one with layer thickness of 20 nm grew with continuous columnar crystalline structures penetrating through interfaces. Higher hardness and Young's modulus were found for the 50-layer TaN multilayer coating approximately 15.1 and 175.5 GPa, respectively. The progressive loading scratch and Rockwell-C adhesion tests were adopted to evaluate the adhesion strength. The anti-corrosion behavior was also analyzed. The amorphous/crystalline structure for the 20-layer TaN multilayer coating showed an elevated critical load for adhesion fracture (Lc2) around 31.6 N due to the large volume ratios for the amorphous structure at initial deposition stage. Superior corrosion resistance for the 20-layer TaN multilayer coating was found due to its amorphous structure.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface and Coatings Technology - Volume 308, 25 December 2016, Pages 108-114
نویسندگان
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