کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5464951 | 1517562 | 2017 | 38 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Effect of nitrogen-argon flow ratio on the microstructural and mechanical properties of AlSiN thin films prepared by high power impulse magnetron sputtering
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
The AiSiN thin films have been deposited by a high power impulse magnetron sputter (HiPIMS) technique using an Al80Si20 alloy target. Effect of nitrogen-argon flow ratios ranging from 5% to 50% on the characterizations of coatings was investigated systematically. Results indicated that the coating microstructure was transformed from the AlSi-rich crystalline metallization nitride to a nanocomposite consisting of c-AlN nano-grains embedded in an amorphous Si3N4 matrix, and then deconvoluted into close to an amorphous structure when the nitrogen-argon flow ratio increased. The mechanical properties of the AlSiN thin films were also strongly influenced by the N2/Ar flow ratios.642
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface and Coatings Technology - Volume 320, 25 June 2017, Pages 138-145
Journal: Surface and Coatings Technology - Volume 320, 25 June 2017, Pages 138-145
نویسندگان
Xiurong Jiang, Fu-Chi Yang, Wei-Chih Chen, Jyh-Wei Lee, Chi-Lung Chang,