کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5465221 | 1398869 | 2016 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Focused ion beam optical patterning of ta-C films
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
Optical contrast formation by Ga+ ion implantation has been used for focused ion beam (FIB) writing of nano-scale optical patterns in tetrahedral amorphous carbon (ta-C). UV-vis optical spectroscopy results with Ga+ broad-beam ion implantation have shown a significant shift of the optical absorption edge to lower photon energies as obtained from optical transmission measurements of ta-C samples, implanted with Ga+ at ion energy E = 20 keV and ion fluences D = 3 Ã 1014 ÷ 3 Ã 1015 cmâ 2. This shift is accompanied by a considerable increase of the absorption coefficient (photo-darkening effect) in the measured photon energy range (0.5 ÷ 3.0 eV). The obtained optical contrast (between implanted and unimplanted film material) could be used in the area of high-density optical data storage using computer controlled focused Ga+ ion beams. The underlying structural modifications, induced by the Ga+ ion bombardment, have been investigated by X-ray photo-electron spectroscopy (XPS) and transmission electron microscopy (TEM). Focused ion beam (FIB) implanted patterns in ta-C samples, obtained with a fluence of 5 Ã 1015 cmâ 2, are also presented.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface and Coatings Technology - Volume 306, Part A, 25 November 2016, Pages 341-345
Journal: Surface and Coatings Technology - Volume 306, Part A, 25 November 2016, Pages 341-345
نویسندگان
T. Tsvetkova, M. Berova, M. Sandulov, S. Kitova, L. Avramov, R. Boettger, L. Bischoff,