Effect of scandium content on structure and piezoelectric properties of AlScN films deposited by reactive pulse magnetron sputtering

Effect of scandium content on structure and piezoelectric properties of AlScN films deposited by reactive pulse magnetron sputtering

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface and Coatings Technology - Volume 309, 15 January 2017, Pages 417-422

Olaf Zywitzki, Thomas Modes, Stephan Barth, Hagen Bartzsch, Peter Frach,