Growth of aluminum oxide thin films with enhanced film density by the integration of in situ flash annealing into low-temperature atomic layer deposition

Growth of aluminum oxide thin films with enhanced film density by the integration of in situ flash annealing into low-temperature atomic layer deposition

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface and Coatings Technology - Volume 309, 15 January 2017, Pages 600-608

Thomas Henke, Martin Knaut, Christoph Hossbach, Marion Geidel, Matthias Albert, Johann W. Bartha,