کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5465571 1517570 2017 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Deposition of thin films using argon/acetylene atmospheric pressure plasma jet
ترجمه فارسی عنوان
رسوب گذاری فیلم های نازک با استفاده از جت پلاسمای فشار اتمسفری آرگون / استیلن
کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
چکیده انگلیسی
Atmospheric pressure plasma jet was used to deposit polymer films from argon/air/acetylene mixture. Depending on the gas composition, three modes of operation were observed and characterized. The film deposited by a stationary jet had a circular shape with area (where thickness was almost constant) about the nozzle inner diameter. The deposition rate of stationary jet decreased with the time: a film of 2 μm was obtained after the first two minutes, while in the next two minutes only 1.3 μm film was deposited. The plasma polymers were characterized by infrared spectroscopy, where variety of CH and few CO bonds were detected. By using a linear displacement system, we obtained homogeneous deposition over a larger area with deposition rate of about 330 nm/min, showing the potential of such plasma jet system for large-scale depositions.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface and Coatings Technology - Volume 312, 25 February 2017, Pages 13-18
نویسندگان
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