Design, fabrication and performance of a new vibration-based electromagnetic micro power generator

This paper presents a new vibration-based electromagnetic micro power generator fabricated using microelectromechanical systems (MEMS) technology, which can convert ambient vibration energy into electric power. The microgenerator consists of a permanent magnet of NdFeB, a copper planar spring and a two-layer copper coil. ANSYS modal analysis was used to predict the resonant frequencies and resonant vibration modes of the spring-mass system. The detailed fabrication processes of the microgenerator are given. Experimental results show that the prototype microgenerator can generate open-circuit voltage of 60 mV ac peak–peak with 121.25 Hz input frequency and the acceleration of 1.5g (g=9.8 m/s2). The experimental and simulated results were compared and discussed.