Scanning distortion correction in STEM images

- Via theoretical modeling and simulation, a deep understanding of the noise influence on the real and reciprocal spaces of STEM images is achieved.
- The atom positions are paid attention in our generalized scanning noise correction method based on a perpendicular scanned STEM image pair.
- Our method takes all ranges of scanning noise frequency into account, and ensures real time correction.
- Scanning noise induced deviations are corrected and the signal to noise ratio is significantly increased in STEM images.

Various disturbances do exist in the image taking process of scanning transmission electron microscopes (STEM), which seriously reduces the resolution and accuracy of STEM images. In this paper, a deep understanding of the scanning distortion influence on the real and reciprocal spaces of STEM images is achieved via theoretical modeling and simulation. A scanning distortion correction algorithm is further developed based on two images scanned along perpendicular directions, which is able to effectively correct scanning distortion induced deviations and significantly increase the signal to noise ratio of STEM images.