کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5467519 1518616 2017 9 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Mass and energy distribution of negatively and positively charged small cluster ions sputtered from GaAs(100) by 150 keV Ar+ bombardment
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
Mass and energy distribution of negatively and positively charged small cluster ions sputtered from GaAs(100) by 150 keV Ar+ bombardment
چکیده انگلیسی
Mass and energy distribution of positively and negatively charged small GaxAsy cluster ions consisting of up to six atoms sputtered from a GaAs(100) surface after 150 keV Ar+ ion bombardment are reported. Positively charged ions contain a larger fraction of Ga atoms while negatively charged ions are rich in As. Measured energy distributions display a maximum at low kinetic energies of a few eV followed by a steep decrease with increasing energy which is more pronounced for larger ions.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 407, 15 September 2017, Pages 132-140
نویسندگان
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