Reinforcement of a PDMS master using an oxide-coated silicon plate

In this work, a new method was developed to increase the stiffness of Polydimethylsiloxane (PDMS) masters using oxide-coated silicon plates, aimed at reducing the residual and deflecting deformations of the PDMS masters for proper pattern transfer. Using this method, these two types of deformations in the reinforced PDMS master have been reduced.