کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
546772 871942 2006 7 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Two-dimensional optical mask design and atom lithography
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
Two-dimensional optical mask design and atom lithography
چکیده انگلیسی

Atom lithography is one of the latest proposals for high-resolution printing. The mask design and generation is key step for implementation of this method. In this paper, we have theoretically investigated and proposed a new method for two-dimensional optical mask design in atom lithography. A new method for realization of our proposed technique based on guided modes will present. With our proposed idea one can easily print every kind of two-dimensional patterns. This method can lead us to produce the nano-scale electronic and optical devices and systems. Also, a suitable algorithm for mask generation is proposed.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronics Journal - Volume 37, Issue 1, January 2006, Pages 57–63
نویسندگان
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