کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5468159 | 1518929 | 2017 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
The Al doping effect on the surface, optical, electrical and nanomechanical properties of the ZnO and AZO thin films prepared by RF sputtering technique
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موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
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چکیده انگلیسی
In this study, ZnO and aluminum doped ZnO (AZO) thin films were deposited at constant RF power of 100Â W for the determine of the structural, surface, optical, electrical and nanomechanical properties. X-Ray diffraction (XRD), atomic force microscopy (AFM), nanoindentation technique and UV-Vis spectrophotometer were used. ZnO (100) and ZnO (004) orientations were detected in the ZnO and AZO films. The crystallite size values for the films were calculated as to be as 35Â nm and 20Â nm for ZnO and AZO thin films, respectively. It was found that the roughness values decreased to 3.15Â nm from 5.15Â nm for AZO and ZnO films, respectively. The hardness values of the ZnO and AZO thin films are measured as 7Â GPa and 11Â GPa. Young's modulus values were determined as 155Â GPa and 95Â GPa for ZnO and AZO films, respectively. The ZnO and AZO thin films have high transparency.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 141, July 2017, Pages 210-215
Journal: Vacuum - Volume 141, July 2017, Pages 210-215
نویسندگان
Suat Pat, Reza Mohammadigharehbagh, Soner Ãzen, Volkan Åenay, H. Hakan Yudar, Åadan Korkmaz,