Combined effect of ion bombardment and nitrogen incorporation on structure, mechanical and optical properties of amorphous Ge2Sb2Te5 films

Combined effect of ion bombardment and nitrogen incorporation on structure, mechanical and optical properties of amorphous Ge2Sb2Te5 films

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 141, July 2017, Pages 32-40

Zhuan Liu, Fei Huang, Haihua Huang, Sam Zhang, Kan Zhang, Weitao Zheng, Chaoquan Hu,