کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5468339 1518932 2017 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
A capillary manometer for pressure measurements in small cavities
ترجمه فارسی عنوان
منومتر مویرگی برای اندازه گیری فشار در حفره های کوچک
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
چکیده انگلیسی
Measuring pressures inside small cavities is a demanding task, but an essential one for applications in microfluidics. Although several MEMS-based pressure sensors have already been demonstrated, their fabrication is complicated and they usually require external electronics, making their use onerous. In this paper we propose a simple, home-built, pressure sensor, based on a thin glass capillary. It is in its essence a gas manometer, where the position of a liquid plug inside a capillary, sealed at one end, is correlated with the pressure at the open end. By calibrating in a vacuum chamber, we achieved a pressure uncertainty of less than 10 mbar. The suitability of the sensor for characterizing polydimethylsiloxane (PDMS) pumps was tested by measuring air diffusion through PDMS rings. Permeability and diffusivity were determined from comparison to the numerical model, based on the finite-difference method (FDM). Their values at 25 °C were found to be 2.5 × 10−6 cm2/s and 1.4 × 10−5 cm2/s, respectively. Although the lifetime of this type of capillary manometer is limited by the evaporation of the liquid plug at low pressures, its small probe size and simple preparation make it a convenient and relatively accurate sensor to quickly measure the pressure in small cavities.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 138, April 2017, Pages 178-183
نویسندگان
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