Integrated CNTs thin film for MEMS mechanical sensors

This paper reports the top-down fabrication of CNTs thin film on MEMS structure, and characterization of piezoresistive coefficients of aligned single wall carbon nanotube (SWNT) forest film. The film was synthesized by water-assisted chemical vapor deposition (CVD), a process known as “super growth”. CNTs film was condensed, manually maneuvered and conveniently patterned by EB lithography to form desirable shapes. The longitudinal and transverse gauge factors of the CNTs thin film were measured to be 3.75 and 0.67, respectively.