Non-ideal behavior of a driving resonator loop in a vibratory capacitive microgyroscope

Many researches have been carried out on the dynamic characteristics of vibratory microgyroscope, but only a few have been carried out on the non-ideal behaviors observed in the driving loop of the vibratory microgyroscope. In this paper, characterization and evaluation of the non-ideal behavior of the vibratory microgyroscope, “peak-and-valley” magnitude phenomenon and phase lag distortion, are discussed. To characterize the non-ideal behavior of a microgyroscope driving loop, a new electro-mechanical simulation model based on the HSPICE of microgyroscope driving loop is proposed. The parasitic capacitive components of the driving loop are found to be the major sources of non-ideal behavior in microgyroscope and it is verified with the simulation results. The validity of the proposed simulation model and the parasitic effects on microgyroscope driving loop is evaluated with the actual fabricated gyroscope.