کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5488989 1399593 2016 17 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Post-annealing effect on the optical property of indium tin oxide sputtered films
ترجمه فارسی عنوان
اثر پس از انلینگ بر روی خواص اپتیکی فیلم های اسپادانین اکسید تیتانیوم
کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه فیزیک و نجوم فیزیک ماده چگال
چکیده انگلیسی
By using the spectroscopic ellipsometric technique, we investigated the excimer laser annealing (ELA) effect on the electronic properties of indium tin oxides (ITO) films fabricated by the DC-sputtering method, which is the one of the most commonly known methods for the commercial ITO films. We found that while the ELA process was helpful for enhancing the electronic property of the sputtered films, the degree of the enhancement was not so sizable as the case of the sol-gel films. This result appeared to originate from the difference in the physical properties of the sol-gel and sputtered amorphous films. We also examined the thermal annealing (TA) effect on the sputtered amorphous films in various ambient conditions, and compared their physical properties with those of the TA sol-gel films.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Current Applied Physics - Volume 16, Issue 12, December 2016, Pages 1576-1580
نویسندگان
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