Keywords: آنزیم لیزر اکسیمر; Phosphorus; Activation; Deactivation; Silicon-on-insulator; Excimer laser annealing;
مقالات ISI آنزیم لیزر اکسیمر (ترجمه نشده)
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Keywords: آنزیم لیزر اکسیمر; Indium tin oxide; Excimer laser annealing; Spectroscopic ellipsometry; Sol–gel
Keywords: آنزیم لیزر اکسیمر; Transparent conductive oxide; Al-doped zinc oxide; RF-magnetron sputtering; Excimer laser annealing;
Keywords: آنزیم لیزر اکسیمر; Indium tin oxide; Excimer laser annealing; Sputtering; Spectroscopic ellipsometry;
Keywords: آنزیم لیزر اکسیمر; AMOLED; Thin film transistors; Excimer laser annealing; Solid phase crystallization
Keywords: آنزیم لیزر اکسیمر; Excimer laser annealing; Silicon nanoparticles; COMSOL Multiphysics model
Effect of laser annealing on ZnO nanorods grown by chemical bath deposition on flexible substrate
Keywords: آنزیم لیزر اکسیمر; Excimer laser annealing; ZnO nanostructures; Flexible substrate; Photoluminescence; Polyimide;
193Â nm Excimer laser processing of Si/Ge/Si(100) micropatterns
Keywords: آنزیم لیزر اکسیمر; SiGe; Laser induced Chemical Vapor Deposition; Excimer laser annealing; Microstructures;
Effects of excimer laser annealing on low-temperature solution based indium-zinc-oxide thin film transistor fabrication
Keywords: آنزیم لیزر اکسیمر; Solution process; Indium-zinc-oxide; Thin-film transistor; Excimer laser annealing
Evolution in morphological, optical, and electronic properties of ZnO:Al thin films undergoing a laser annealing and etching process
Keywords: آنزیم لیزر اکسیمر; Transparent conductive oxide; Excimer laser annealing; Texturing; Photovoltaic; Raman spectroscopy; X-ray diffraction
Study on excimer laser irradiation for controlled dehydrogenation and crystallization of boron doped hydrogenated amorphous/nanocrystalline silicon multilayers
Keywords: آنزیم لیزر اکسیمر; Excimer laser annealing; Dehydrogenation; Hydrogenated amorphous silicon; Boron doped nanocrystalline silicon;
Development of an industrial tool to make passivation layers for UV sensors improvement
Keywords: آنزیم لیزر اکسیمر; Excimer laser annealing; Plasma Immersion Ion Implantation; Ultra shallow junctions; Passivation layer; UV sensors;
FEM numerical analysis of excimer laser induced modification in alternating multi-layers of amorphous and nano-crystalline silicon films
Keywords: آنزیم لیزر اکسیمر; Excimer laser annealing; a-Si; nc-Si; Dehydrogenation; Numerical modelling;
Enthalpy based modeling of pulsed excimer laser annealing for process simulation
Keywords: آنزیم لیزر اکسیمر; Excimer laser annealing; Silicon; Simulation; TCAD;
Structural and morphological transformations of TiO2 nanotube arrays induced by excimer laser treatment
Keywords: آنزیم لیزر اکسیمر; Anodic oxidation; Titanium dioxide; Nanotube arrays; Excimer laser annealing; Structural properties; X-ray diffraction; Scanning electron microscopy;
Low-temperature crystallization and electrical properties of BST thin films using excimer laser annealing
Keywords: آنزیم لیزر اکسیمر; BST; Thin film; Excimer laser annealing; Embedded capacitor; System-on-package; Sol–gel
Dynamical resolidification behavior of silicon thin films during frontside and backside excimer laser annealing
Keywords: آنزیم لیزر اکسیمر; Resolidification behavior; Average solidification velocity; Excimer laser annealing; Silicon thin films
A novel optical diagnostic technique for analyzing the recrystallization characteristics of polycrystalline silicon thin films following frontside and backside excimer laser irradiation
Keywords: آنزیم لیزر اکسیمر; Optical diagnostic technique; Polycrystalline silicon thin films; Excimer laser annealing
Study of ultra-shallow p+n junctions formed by excimer laser annealing
Keywords: آنزیم لیزر اکسیمر; Ultra-shallow junction; Excimer laser annealing; Post low-temperature treatment
Formation of silicon ultra shallow junction by non-melt excimer laser treatment
Keywords: آنزیم لیزر اکسیمر; Excimer Laser Annealing; Boron diffusion kinetics
Observation of explosive crystallization during excimer laser annealing using in situ time-resolved optical reflection and transmission measurements
Keywords: آنزیم لیزر اکسیمر; Explosive crystallization; Excimer laser annealing; In situ time-resolved optical reflection and transmission measurement; Crystallization mechanism
Experimental determination of La2O3 thermal conductivity and its application to the thermal analysis of a-Ge/La2O3/c-Si laser annealing
Keywords: آنزیم لیزر اکسیمر; Thermal conductivity; Rare earth oxides; Excimer laser annealing; Numerical model
Role of hydrogen in excimer laser annealing of hydrogen-modulation doped a-Si film
Keywords: آنزیم لیزر اکسیمر; Excimer laser annealing; Hydrogen-modulation doped amorphous silicon; Nucleation; Desorption energy; Polycrystalline silicon; Amorphous silicon
Laser annealing effects on the structural, optical and magnetic properties of sputtered Zn0.95Co0.05O thin film
Keywords: آنزیم لیزر اکسیمر; Co-doped ZnO; Spintronics; Thin films; Excimer laser annealing; Ferromagnetism
Numerical analysis of Excimer laser assisted processing of multi-layers for the tailored dehydrogenation of amorphous and nano-crystalline silicon films
Keywords: آنزیم لیزر اکسیمر; 61.80.Ba; 81.40.Ef; 82.30.Rs; 73.61.Jc; Excimer laser annealing; a-Si:H; nc-Si; Dehydrogenation; Numerical model;
Analysis of excimer laser annealing of amorphous SiGe on La2O3//Si structures
Keywords: آنزیم لیزر اکسیمر; Poly SiGe; La2O3; Excimer laser annealing; Crystallization;
SiGe: An attractive material for post-CMOS processing of MEMS
Keywords: آنزیم لیزر اکسیمر; Silicon germanium; Excimer laser annealing; MEMS Post-Processing
Advanced excimer-based crystallization systems for production solutions
Keywords: آنزیم لیزر اکسیمر; Excimer laser annealing; ELA; SLS; Poly-Si; LTPS; SOG;
Cathodoluminescence and epitaxy after laser annealing of Cs+-irradiated α-quartz
Keywords: آنزیم لیزر اکسیمر; 61.80.Jh; 81.15.Np; 42.70.Ce; 42.55.Lt; 42.62-b; Epitaxy; Ion implantation; Quartz; Excimer laser annealing;
Excimer Laser annealing for shallow junction formation in Si power MOS devices
Keywords: آنزیم لیزر اکسیمر; Excimer laser annealing; Shallow junctions; Power MOSFET
Laser annealing of BST thin films with reduced cracking at an elevated temperature
Keywords: آنزیم لیزر اکسیمر; Thin films; Sol–gel; Excimer laser annealing; Barium strontium titanate
Monitoring explosive crystallization phenomenon of amorphous silicon thin films during short pulse duration XeF excimer laser annealing using real-time optical diagnostic measurements
Keywords: آنزیم لیزر اکسیمر; Explosive crystallization phenomenon; Excimer laser annealing; Silicon thin films; Optical diagnostic measurements
Production solutions in excimer laser thin film crystallization
Keywords: آنزیم لیزر اکسیمر; Excimer laser annealing; ELA; SLS; Poly-silicon; LTPS;