Production solutions in excimer laser thin film crystallization

Excimer laser crystallization of thin film amorphous silicon has become a key technology in manufacturing of high-resolution low-power consumption thin film transistor displays. Lambda Physik and its Beam Delivery Systems Department MicroLas are leading the efforts to develop complete laser-optical system solutions comprising uniformity, productivity and economic aspects of this UV-laser process. This paper will present latest achievements in high-power excimer laser and illuminator design to address the production requirements of thin film crystallization and will look at challenges to meet future requirements.