Combining discrete event simulation and material flow analysis in a component-based approach to industrial environmental protection

While eco-balances and Material Flow Networks are common analysis tools of Environmental Management Information Systems (EMIS), discrete event simulation has not been used widely for this purpose. This paper argues in favour of combining discrete event simulation with material flow analysis to explore both the environmental and economic impact of business decisions.After a brief overview of core characteristics and benefits of discrete event simulation and material flow analysis using Material Flow Networks, a plug-in architecture for generating customized material flow simulators is presented. The benefits of this framework's component-based structure are then discussed in terms of its practical application to the lithography stage of the semiconductor manufacturing process. A summary of the framework's most significant characteristics and areas of application concludes the paper.