Retreatment of silicon slurry by membrane processes

► Membrane processes were used to regenerate Silicon CMP slurry effluent ► A two-step ultrafiltration process was performed at laboratory and industrial scales ► A new hybrid process (membrane ultrafiltration and chemical addition) is developed ► A ratio of 0.65 of dissolved chemicals allows RR and TTV to be within specifications ► At industrial scale, the hybrid process enables the reuse of electronic effluents