کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
582960 | 1453169 | 2008 | 7 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Environmental and health risk analysis of nitrogen trifluoride (NF3), a toxic and potent greenhouse gas
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی شیمی
بهداشت و امنیت شیمی
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چکیده انگلیسی
This article aimed at the introduction of nitrogen trifluoride (NF3) and its decomposition products into its hazards to the environment and health because this perfluorocompound is a toxic and potent greenhouse gas not blanketed into the Kyoto Protocol. This paper also predicted the global NF3 emissions from the electronics industry on the basis of the methodologies recommended by the Intergovernmental Panel on Climate Change (IPCC), and further discussed its atmospheric implications according to the estimation of environmental fate for NF3. It showed that the vaporization of NF3 from the water bodies to the atmosphere is very high according to its predicted value (ca. 6.0Â ÃÂ 105Â MPa) of Henry's law constant (KH). Furthermore, NF3 emitted from the electronics industry around the world in 2006 was estimated to be between 3.6 and 56 metric tonnes and it will be on increasing trend in the near future. Although the accumulative amount of NF3 in the atmosphere currently should be very negligible based on the predicted ratio (the order of 10â6 to 10â7) of equivalent CO2 emission from NF3 to total equivalent CO2 emissions from potent greenhouse gases, it is necessary to adopt the available abatement and also monitor the concentration of NF3 in the workplaces for reducing the overall environmental and health impacts of various semiconductor processes.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Hazardous Materials - Volume 159, Issues 2â3, 30 November 2008, Pages 257-263
Journal: Journal of Hazardous Materials - Volume 159, Issues 2â3, 30 November 2008, Pages 257-263
نویسندگان
Wen-Tien Tsai,