RSM base study of the effect of deposition temperature and hydrogen flow on the wear behavior of DLC films

A statistical study of the effects of deposition temperature and hydrogen flow on the wear behavior of DLC films was examined using the RSM method based on a central composite design. DLC films were deposited on the nitrocarburized AISI 4140 steel by the pulsed DC PACVD method at temperature range of 60-120 °C and in an atmosphere of hydrogen range of 0-40 sccm. Results indicated that a combination of relatively high deposition temperature and low hydrogen flow or low deposition temperature and high hydrogen flow produce DLC film with low wear rate and low friction coefficient.