Wear and oxidation behavior of reactive sputtered δ-(Ti,Mo)N films deposited at different nitrogen gas flow rates

Wear and oxidation behavior of reactive sputtered δ-(Ti,Mo)N films deposited at different nitrogen gas flow rates

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Tribology International - Volume 87, July 2015, Pages 32-39

S. Komiyama, Y. Sutou, K. Oikawa, J. Koike, M. Wang, M. Sakurai,