Performance and stability analysis of gas-lubricated journal bearings in MEMS

► A mathematical model and a computational methodology were presented to simulate the complicated flow behaviors in the journal micro-bearing at the slip regime. ► The modified Reynolds equation with slip effect was derived and developed. ► The load carrying capacity of the bearing increases nonlinearly and the attitude angle decreases gradually with the increase of the bearing number. ► The slip flow boundary condition enhances the stability of the equilibrium points of the gas-lubricated journal bearing-rotor system.