A simple approach to fabricate amorphous silicon pattern on single crystal silicon

Scratch tests on single crystal silicon under dry sliding and pentadecane lubrication are performed on a commercially available nano-scratch tester. Loads range of elastic, elasto-plastic deformation and fracture are classified according to depth-load curves. A fully plastic removal of single crystal silicon below critical load for fracture is observed under pentadecane lubrication, which is quite different from that under dry sliding. Raman micro-spectra indicate that the phase compositions of the scratched track under dry sliding consist of a number of phases, including Si-I, Si-III, Si-XII and a-Si, while the phase composition of the track under pentadecane lubrication consists of single a-Si. Based on the results obtained, a simple approach to fabricate amorphous silicon pattern on single crystal silicon is introduced and discussed.