Wear-corrosion properties of diamond conditioners in CMP slurry

There are three types of conditioners discussed, they were manufactured as follows: (a) bonded by electroplating nickel (ED); (b) brazing Ni-Cr alloy (BD); and (c) diamond-like carbon (DLC) film deposition on a brazed conditioner (BDD). After a wear-corrosion test, the brazing process shows no diamond fall-out when compared with the electroplating process. The denser distribution of diamond grits causes a lower coefficient of friction and a lower weight loss of counterpart, and this in turn causes the ring rotating but less ploughing action during the wear-corrosion test. A good clearance between each diamond grits benefits the penetration against counterpart, and indeed scrapes (i.e. conditions) more efficiently. DLC film deposited on the conditioner surface of brazed Ni-Cr alloy conditioner BDD exhibits the best overall performance in terms of a higher removal rate, a lower wear loss and a better corrosion resistance when compared with conditioners ED and BD.