Characterization and gas permeation properties of amorphous silica membranes prepared via plasma enhanced chemical vapor deposition

Characterization and gas permeation properties of amorphous silica membranes prepared via plasma enhanced chemical vapor deposition

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Membrane Science - Volume 441, 15 August 2013, Pages 45-53

Hiroki Nagasawa, Hironobu Shigemoto, Masakoto Kanezashi, Tomohisa Yoshioka, Toshinori Tsuru,