A sensor-equipped microchannel system for the thermal characterization of rarefied gas flows

► A microchannel device for the characterization of gas flows has been realized. ► Miniaturized temperature sensors have been realized on a silicon substrate. ► The microsensor system can be integrated in microchannels from different materials. ► The measuring principle of the sensor system has been validated with experiments. ► A calibration procedure for the microsensors has been identified.