کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
6945353 | 1450474 | 2016 | 13 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Electronic frequency compensation of AlN-on-Si MEMS reference oscillators
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی کامپیوتر
سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
In this paper we report on the design of a frequency compensation system for AlN-on-Si MEMS reference oscillator to replace temperature compensated crystal oscillators (TCXOs) in cellular handsets. A 76.8 MHz, 105 ppm Temperature Stable, AlN-on-Si MEMS Oscillator is designed to demonstrate the frequency compensation scheme. Double layers of SiO2 are used for passive temperature compensation. The oscillator consumes 850 μA, with phase noise of â127 dBc/Hz at 1 kHz frequency offset. Temperature drift errors and initial frequency offset of ±8000 ppm are combined and further tackled electronically. A simple digital compensation circuitry generates a compensation word to a 21-bit MASH 1-1-1 ÎΣ modulator included in LTE fractional N-PLL for frequency compensation. Temperature is sensed using 4.6 μA, 11.5 bit temperature to digital converter TDC with resolution of 0.1 °C in 100 ms conversion time. The paper presents the first AlN-on-Si oscillator platform with ±0.5 ppm frequency stability over temperature ranges from â40 °C to 85 °C. The system runs on 1.8 V supply in 32 nm CMOS.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronics Journal - Volume 54, August 2016, Pages 72-84
Journal: Microelectronics Journal - Volume 54, August 2016, Pages 72-84
نویسندگان
Ali Kourani, Emad Hegazi, Yehea Ismail,