Electrical characterization of multiple leakage current paths in HfO2/Al2O3-based nanolaminates

Electrical characterization of multiple leakage current paths in HfO2/Al2O3-based nanolaminates

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronics Reliability - Volume 55, Issues 9–10, August–September 2015, Pages 1442-1445

A. Rodríguez, M.B. Gonzalez, F. Campabadal, J. Suñé, E. Miranda,