As-grown donor-like traps in low-k dielectrics and their impact on intrinsic TDDB reliability

As-grown donor-like traps in low-k dielectrics and their impact on intrinsic TDDB reliability

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronics Reliability - Volume 54, Issues 9–10, September–October 2014, Pages 1675-1679

B.J. Tang, K. Croes, Y. Barbarin, Y.Q. Wang, R. Degraeve, Y. Li, M. Toledano-Luque, T. Kauerauf, J. Bömmels, Zs. Tőkei, I. De Wolf,