کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
699834 | 890800 | 2012 | 12 صفحه PDF | دانلود رایگان |
Acceleration feedback increases the mass of a system as experienced by disturbance forces. A high bandwidth is required to avoid phase lag in the position control loop. This article splits the acceleration controller in a forward and backward path to create the original process behavior for the position controller, removing the high-bandwidth requirement. Digital controller effects, incorporation of plant dynamics, and implications for setpoint feedforward are discussed. The method is implemented in the stage of a lithographic scanner operating at nanometer accuracy in semiconductor manufacturing. It is shown that the low-frequent disturbance rejection is considerably improved without impacting higher-frequency performance.
► Acceleration feedback increases the virtual mass as felt by a disturbance force.
► Application within a position feedback loop requires a high bandwidth.
► Splitting acceleration controller in forward and backward path solves this problem.
► Application to lithographic stage shows improved disturbance force rejection.
Journal: Control Engineering Practice - Volume 20, Issue 4, April 2012, Pages 453–464