Tribological performances of the graphite-like carbon films deposited with different target powers in ambient air and distilled water

Graphite-like carbon (GLC) films were deposited using magnetron sputtering technique with different target currents. With the increase of target current, the deposition rate and sp2 site increased, while the mechanical properties and film compactness decreased. In ambient air, decreased elastic modulus led to the high friction of GLC film. In distilled water, water lubrication resulted in the similar low friction coefficients if the GLC film could survive. The decrease of mechanical properties caused the increase of specific wear rate in ambient air. The decrease of film compactness generated the increase of specific wear rate in distilled water.