Cathode electrodeposition and characterization of Ru nanoparticles doped a-CNx:H composite films

Well-dispersed and stable Ru nanocrystalline particles with diameter in the range of 2–4 nm embedded in the amorphous carbon nitride matrix were synthesized on single crystal silicon (100) substrate by cathode electrochemical deposition using acetonitrile and Ru3(CO)12 as carbon source and dopant, respectively. The results obtained from high-resolution transmission electron microscopy showed that the Ru nanoparticles were presented in the form of hexagonal Ru crystal structure with preferred orientation of (101). X-ray photoelectron spectroscopy and Fourier transform infrared spectroscopy confirmed that the as-obtained films are composed of C, N, Ru and H. Raman spectroscopy indicated that the films contained tetrahedral (sp3) and trigonal (sp2) bonding structures. After doping Ru into the amorphous carbon nitride matrix, the conductivity of the composite films is commendably enhanced and the cyclic voltammograms tests show evident oxidation and visible reduction peaks of Ru, also indicating the presence of Ru immobile phase in the amorphous carbon matrix.