Diamond film synthesis at low temperature

Sulfur-assisted hot-filament chemical vapor deposition was successfully employed to synthesize diamond films at relatively low substrate temperatures, sub 500 °C, on Mo and glass substrates. This result is ascribed to sulfur-containing species that create an additional carbon transport channel to the substrate, which explicitly requires a large temperature gradient to effectively operate. The grain size and roughness were found to decrease when the Mo substrate temperature was decreased, while the quality factor only showed a slight decrease. Moreover, the diamond quality, grain size, and roughness were found to increase on glass substrates in comparison to those on Mo substrates.