Tensile strength of DLC films evaluated by a nanomaterials testing system

Tensile testing of a diamond-like carbon (DLC) film, peeled off from the substrate, was carried out using a nanomaterials testing system (NTS) that consisted of a nanomaterials tester and a scanning electron microscope. The stress–strain curve of the DLC film was successfully measured with this system. The Young's modulus of the film was estimated from the S–S curve to approximately 110 GPa. This result matches the range of Young's modulus values measured by indentation. The execution of the tensile test in DLC films made clear that notch processing of the film was necessary because of brittleness. The experimental results demonstrated that the NTS would be one of the effective testing methods to evaluate the mechanical characteristics of DLC films.

► We carried out tensile test of a DLC film by the originally developed testing system.
► Stress–strain curve of the DLC film was measured by the testing system.
► The obtained Young's modulus mostly agreed with the result of the indentation test.
► The testing system is available for evaluating mechanical properties of the films.