کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
702401 | 891096 | 2007 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Polytype formation in silicon carbide single crystals
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موضوعات مرتبط
مهندسی و علوم پایه
سایر رشته های مهندسی
مهندسی برق و الکترونیک
پیش نمایش صفحه اول مقاله

چکیده انگلیسی
SiC single crystals were grown on the seeds with different root-mean-square (RMS) roughness by physical vapor transport (PVT) method. Green and yellow zones appeared in the same wafer. Decreasing the RMS roughness, the yellow zone was increased and the wafer was uniform. The green and yellow zones corresponded to 6H and 4H polytype, respectively. Based on Raman spectra and structural characterization, SiC polytype formation mechanism was discussed. It was found that the polytype was dependent on the seed RMS roughness.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Diamond and Related Materials - Volume 16, Issue 3, March 2007, Pages 654–657
Journal: Diamond and Related Materials - Volume 16, Issue 3, March 2007, Pages 654–657
نویسندگان
Xiang-Biao Li, Er-Wei Shi, Zhi-Zhan Chen, Bing Xiao,