Nanoelectromechanical switch fabricated from single crystal diamond: Experiments and modeling

The nanoelectromechanical system (NEMS) switches based on all single crystal diamond were reported both in experiments and in modeling. In the all-diamond NEMS switch, boron-doped diamond epilayer was utilized to obtain the electrical conductivity, while the type-Ib diamond substrate acted as an excellent insulator. The developed diamond NEMS switches exhibited good controllability, reproducibility, and reliability. Finite element analysis was employed to simulate the operation of the NEMS switch. The experimental data were consistent with the numerical simulation, resulting in a Young's modulus of 1100 GPa for diamond. The simulation revealed that the pull-in voltage of the single crystal diamond three-terminal NEMS switches could be controlled by the drain voltage.

► Single crystal diamond suspended structures for N/MEMS are fabricated with various geometries.
► Single crystal diamond nanoelectromechanical switches are developed.
► The switching behavior of the diamond nanoelectromechanical switch is modeled.
► The numerical simulation is consistent with the experiments.
► The work provides the route for single crystal diamond N/MEMS.